Title of article
New insights into aging phenomena from plasma chemistry
Author/Authors
Yasuda، نويسنده , , Hirotsugu، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
16
From page
15
To page
30
Abstract
While gas discharges under atmospheric pressure occur as filamentary discharges, most studies on plasma polymerization, or plasma Chemical Vapor Deposition, were carried out in low-pressure (low-temperature, non-equilibrium) plasma. However, it is reasonable to assume that the fundamentals of plasma polymerization found by low-pressure discharge apply to the gas phase in the filamentary discharge. Plasma polymerization as a potential cause of aging effects is reviewed with respect to (1) polymerization in DC discharge, (2) competitive ablation and polymerization principle, and (3) from the viewpoint of detector wire aging.
Keywords
Plasma CVD , plasma etching , Molecular dissociation
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
2003
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2200700
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