• Title of article

    New insights into aging phenomena from plasma chemistry

  • Author/Authors

    Yasuda، نويسنده , , Hirotsugu، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2003
  • Pages
    16
  • From page
    15
  • To page
    30
  • Abstract
    While gas discharges under atmospheric pressure occur as filamentary discharges, most studies on plasma polymerization, or plasma Chemical Vapor Deposition, were carried out in low-pressure (low-temperature, non-equilibrium) plasma. However, it is reasonable to assume that the fundamentals of plasma polymerization found by low-pressure discharge apply to the gas phase in the filamentary discharge. Plasma polymerization as a potential cause of aging effects is reviewed with respect to (1) polymerization in DC discharge, (2) competitive ablation and polymerization principle, and (3) from the viewpoint of detector wire aging.
  • Keywords
    Plasma CVD , plasma etching , Molecular dissociation
  • Journal title
    Nuclear Instruments and Methods in Physics Research Section A
  • Serial Year
    2003
  • Journal title
    Nuclear Instruments and Methods in Physics Research Section A
  • Record number

    2200700