Author/Authors :
Bruijn، نويسنده , , Marcel P. and Baars، نويسنده , , Norman H.R. and Bergmann Tiest، نويسنده , , Wouter M. and Germeau، نويسنده , , Alexander and Hoevers، نويسنده , , Henk F.C. and de Korte، نويسنده , , Piet A.J. and Mels، نويسنده , , Wim A. and Ridder، نويسنده , , Marcel L. and Krouwer، نويسنده , , Eric and van Baar، نويسنده , , John J. and Wiegerink، نويسنده , , Remco J. Wiegerink and Roelof F. Wassenaar ، نويسنده ,
Abstract :
We report on the development activities towards a cryogenic array of micro-calorimeters, based on voltage-biased Ti/Au transition edge thermometers. Fabrication issues are discussed along the lines of two fabrication routes. One route utilizes bulk micromachining in [1 1 0] Si wafers, the other route surface micromachining with a sacrificial layer. Prototype 5×5 arrays have been fabricated and we present the first performance data: Two arrays were irradiated with 5.9 keV X-ray irradiation and an energy resolution of 6–7 eV FWHM was obtained. The arrays have been designed and their performance is analyzed with the aid of finite element simulation of the electrothermal behavior of a single pixel and thermal conductivity in the supporting structure.
Keywords :
Microcalorimeter , X-ray Astronomy , X-ray detector , Cryogenic sensor , Micro machining , XEUS , Imaging array
