Author/Authors :
Chervenak، نويسنده , , J.A and Finkbeiner، نويسنده , , F.M. and Stevenson، نويسنده , , T.R and Talley، نويسنده , , D.J and Brekosky، نويسنده , , R.P and Bandler، نويسنده , , S.R and Figueroa-Feliciano، نويسنده , , E and Lindeman، نويسنده , , M.A and Kelley، نويسنده , , R.L and Saab، نويسنده , , T and Stahle، نويسنده , , C.K، نويسنده ,
Abstract :
NASAʹs Constellation-X (Con-X) mission is a driver for advancing low-temperature detector technologies, requiring 1000-pixel two-dimensional arrays with >95% filling fraction and quantum efficiency at 6 keV and better than 4 eV energy resolution for 1–10 keV photons. We describe a robust transition edge sensor fabrication process that can produce detector arrays with integrated absorbers approaching the specifications of Con-X. We address issues such as the methods of superconducting bilayer deposition, detector geometry definition, and absorber interface.
