Title of article
Preparation of self-supporting targets with thickness <100 μg/cm2
Author/Authors
Fan، نويسنده , , Qiwen and Xu، نويسنده , , Guoji and Du، نويسنده , , Yinghui and Zhang، نويسنده , , Rong، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2010
Pages
4
From page
392
To page
395
Abstract
Preparation techniques are described for self-supporting targets with thickness of less than 100 μg/cm2 by means of vacuum evaporation and focused heavy-ion beam sputtering. With a visible light photo spectrometer optical transmittance as a function of thickness was calibrated for several metal films of different elements. These data were used for thickness determination of self-supporting targets of those materials.
Keywords
Self-supporting , Vacuum deposition , Focused heavy-ion beam sputtering , Thickness by optical transmittance
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
2010
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2209446
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