Realization of a computed tomography setup to achieve resolutions below 1 μm

The amelioration of present X-ray imaging systems especially in computed tomography to resolutions below 1 μm necessitates very precise equipment details such as the manipulators, focus size and stability of the tube and the detector adjustment. In this paper, we present an experimental setup of a computed tomography system with sub-micrometer resolution. The requirements on and characteristics of the components and their influence on the measurements are discussed and exemplary results of different test objects in the field of non-destructive testing with sub-micrometer resolution are presented.