Title of article
Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler
Author/Authors
Yashchuk، نويسنده , , Valeriy V. and Barber، نويسنده , , Samuel and Domning، نويسنده , , Edward E. and Kirschman، نويسنده , , Jonathan L. and Morrison، نويسنده , , Gregory Y. and Smith، نويسنده , , Brian V. and Siewert، نويسنده , , Frank and Zeschke، نويسنده , , Thomas and Geckeler، نويسنده , , Ralf and Just، نويسنده , , Andreas، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2010
Pages
12
From page
212
To page
223
Abstract
A new low-budget slope measuring instrument, the Developmental Long Trace Profiler (DLTP), was recently brought to operation at the ALS Optical Metrology Laboratory. The design, instrumental control and data acquisition system, initial alignment and calibration procedures, as well as the developed experimental precautions and procedures are also described in detail. The capability of the DLTP to achieve sub-microradian surface slope metrology is verified via cross-comparison measurements with other high-performance slope measuring instruments when measuring the same high-quality test optics. The directions of future work to develop a surface slope measuring profiler with nano-radian performance are also discussed.
Keywords
Long trace profiler , Surface slope measurement , Surface Metrology , Pentaprism , X-ray optics , Autocollimator , Surface profilometer
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
2010
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2211495
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