Author/Authors :
Senba، نويسنده , , Y. and Kishimoto، نويسنده , , H. and Ohashi، نويسنده , , H. and Yumoto، نويسنده , , H. and Zeschke، نويسنده , , T. and Siewert، نويسنده , , F. and Goto، نويسنده , , S. and Ishikawa، نويسنده , , T.، نويسنده ,
Abstract :
The long trace profiler (LTP) at SPring-8 has been upgraded to improve stability and resolution of slope measurement. The performances of the upgraded LTP at SPring-8 are presented by cross-checking measurements on a flat mirror with data obtained using Nanometer Optical Component Measuring Machine (NOM) at the Helmholtz Zentrum Berlin / BESSY-II.
Keywords :
Optical metrology , Surface profile measurement , Synchrotron radiation , Long trace profiler , X-Ray mirror
