A Nanometre-precision, Ultra-stiff Plezostepper Stage for ELID-grinding

The extremely high machine stiffnesses required for a successful Implementation of ELectrolytic in-process Dressing (ELID) grinding cannot be obtained win conventional technologies. In this paper, an Innovative drive concept is presented, where the actuation and guiding functions in three degrees of freedom are combined in one functional unit, using an original plezo-stepping technology. The stage is actively positioned by a set of six ‘feet’ giving it an infinite static stiffness in all six degrees of freedom. The drive motions in x-, y- and C-directions are obtained by rolling the feet over the base surface in a three-by-three feet gait pattern. The stepping resolution can be as low as 2.5 nm. Hammering is avoided by force-controlled stepping. The x and y stage positions are interferometrically measured. Thermal errors are minimised by a symmetrical design.