Characterization of nano-layered multilayer coatings using modified Bragg law

In this paper, the modified Bragg law is used to characterize nano-layered multilayer coatings having two or four different layer constituents based on measured low-angle X-ray diffraction spectra. Comparisons of the modulation periods measured directly from TEM micrographs, and determined by the modified Bragg law, indicate that low-angle X-ray diffraction technique is a reliable method in characterizing nano-layered multilayer structures. However, a proper application of the modified Bragg law relies on the correct identification of the order of reflection peaks, which is not a straightforward process under certain circumstances. A practical approach has been recommended to address this issue. Furthermore, the appearance of extra peaks is discussed in this paper.