A Fast, High-stiffness and High-resolution Piezoelectric Motor with Integrated Bearing and Driving Functionality

With growing requirements on the precision of production machines, as expressed by the Taniguchi curves, the need arises for novel actuators that are able to combine high stiffness and high position resolution with high drive speeds. In this paper two novel integrated linear actuation systems with high active stiffness and with the unique ability to provide simultaneously high-resolution slow motion and lower-resolution high-speed motion, based on piezotechnology, are presented. ial applications are stages for novel high-precision abrasive machining (e.g. ultraprecision grinding), lithography (e.g. extreme-UV wafer steppers), positioning devices working in vacuum (e.g. scanning electron microscopy).