Numerical and experimental analysis of transient state micro-bounce of aerostatic guideways caused by small pores

Aerostatic guideways have been applied to precision machine elements. Recently, downsizing and the increased use of high-density technology in IT devices have generated demand for higher accuracy in aerostatic guideways. It has been pointed out that the micro-bounce occurs when the slider passes over the aerostatic guideway with small pores. This transient state micro-vibration decreases the accuracy of aerostatic guideways and, thus, it is now expected to be suppressed. The purpose of this study is to analyze the micro-bounce mechanism of aerostatic guideways caused by pores, and to propose new designs for the suppression of micro-bounce.