Nanoindentation: Measuring methods and applications

Nanoindentation has emerged as an important method for the evaluation of the mechanical response of small material volumes and thin films to applied loading. Here, we present a review of the measurement method, the instruments currently in use and the procedures for the analysis of the resulting data. The methods developed for verification and calibration, including a discussion on uncertainty of parameters are presented. The results of the most recent CIRP sponsored comparison on nanoindentation are presented and compared to the results obtained in the first such comparison. Examples of some of the emerging uses of the technique are included.