A novel standard for the experimental estimation of the uncertainty of measurement for micro gear measurements

In micrometer dimensions the uncertainty of measurement is essential for reliably determining part quality. However, calibrated standards are necessary to experimentally estimate the uncertainty of measurement. Due to the complex shape of micro gears (e.g. involute tooth flanks), which cannot be manufactured precisely enough to be represented in the standard, simple geometric elements are utilized. The presented novel micro gear standard uses cylinders to model the involute tooth flanks. The approach describes the estimation of the uncertainty of measurement for measurements of the profile, helix, pitch and tooth flank deviations. Furthermore, initial measurement results of a prototypical standard are provided.