Dimensional measurement of microform with high aspect ratio using an optically controlled particle with standing wave scale sensing

A new measurement technique based on the localized optical interference scale formed by a standing wave is proposed. The scale is sensed using a microprobe controlled three dimensionally by radiation pressure. The feasibility of this novel probing technique is examined by measuring the depth of a micro-groove using the displacement sensing method based on a coordinate measurement system. Since the effective length of the standing wave scale is more than 250 μm, the microprobe enables us to measure a micro-fine figure with a high aspect ratio.