• Title of article

    Dispersed reference interferometry

  • Author/Authors

    Martin، نويسنده , , Haydn and Jiang، نويسنده , , Xiangqian، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2013
  • Pages
    4
  • From page
    551
  • To page
    554
  • Abstract
    Dispersed reference interferometry (DRI) is a potentially useful technique for applications such as absolute displacement, surface topography and film thickness measurement. A bulk optic implementation of a short coherence dispersed reference interferometer is described with the chromatic dispersion applied using two matched transmission gratings in one arm. Such an interferometer can provide absolute knowledge of position by tracking a symmetrical fringe pattern produced by a spectrometer. An operating principle is presented and validation provided through empirical data from optical apparatus. We present experimental results for the resolution, linearity and repeatability of the investigated interferometer apparatus.
  • Keywords
    Interferometry , measuring instrument , DIMENSIONAL , surface
  • Journal title
    CIRP Annals - Manufacturing Technology
  • Serial Year
    2013
  • Journal title
    CIRP Annals - Manufacturing Technology
  • Record number

    2269963