The Development of Atom Probe Field-Ion Microscopy

A review of the development of the techniques of atom probe field-ion microscopy and atom probe tomography is presented. The development is traced from the original time-of-flight atom probe field-ion microscope developed by Müller, Panitz, and McLean in 1968 to the energy-compensated three-dimensional atom probes that are commercially available today. The various types of atom probes that have been developed are described. Published by Elsevier Science Inc.