Effects of frequencies of AC modulation voltage on piezoelectric-induced images using atomic force microscopy

Lead zirconate titanate (PZT) thin film is prepared by sol-gel method on Pt/Ti electrode/SiO2/Si wafer. Local poling is performed on the PZT film using an atomic force microscope (AFM). The topography and piezoelectric-induced (PEI) images on the polarized PZT film are recorded using AFM at piezo-responsive mode, operated with an AC voltage at varying frequencies. The best PEI image was obtained at the frequency around 300 kHz. It is explained that the change of piezoelectric vibrations and input noise signals with the frequency of AC modulation voltage affects the intensity of PEI images.