Process chain for serial manufacture of 3D micro- and nano-scale structures

This paper presents a cost effective route for serial fabrication of 3D structures and the achievement of function and length scale integration (FLSI) in products. A complex 3D functional pattern was designed and then used to validate this route for serial manufacture of component that integrates micro and nano scale functional features. It employs a viable master-making process chain that integrates, innovatively compatible and at the same time complementary, structuring and replication technologies to fabricate Ni shims. The shims are then utilised for the hot embossing of structures incorporating different 2.5D and 3D length-scale features. The resulting 3D profiles at different stages of the process chain were investigated and the factors affecting its overall performance were analysed.