Title of article
An introduction to ultimate lithography
Author/Authors
Brillouët، نويسنده , , Michel، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
4
From page
837
To page
840
Abstract
Lithography has been the key enabler for scaling feature sizes of integrated circuits, allowing the exponential growth of the semiconductor industry. This article will briefly describe the major challenges of this technology in microelectronics and introduce the review articles presented in this special issue. To cite this article: M. Brillouët, C. R. Physique 7 (2006).
Journal title
Comptes Rendus Physique
Serial Year
2006
Journal title
Comptes Rendus Physique
Record number
2283727
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