Advanced mask manufacturing

In this article the fabrication of advanced masks will be briefly outlined and some specific aspects will be discussed. It will be shown that the increasing design complexity and the complexification of the optical lithographic process generate major issues on all aspects of the fabrication and control of such masks. These issues have not only technical but also economical impacts that will also be outlined. To cite this article: C. Reita, C. R. Physique 7 (2006).