INNOVATIONS IN MICRO/NANO PATTERNING USING TOOL-BASED METHODS

In recent years, the trend in miniaturization of products has been pervasive in areas such as information technology, biotechnology, and the environmental and medical industries. Micro/Nano patterning is the key supporting technology that has to be developed to meet the challenges posed by product miniaturization requirements and the industrial realization of nanotechnology. Micro/Nano patterning techniques can be based on energy beams or solid cutting tools (tool-based micro-machining). Tool-based micro/nano patterning is a relatively new area; however, over the last two decades, owing to the predominant trend in the miniaturization of products, micro/nano patterning using tool-based techniques has become a key supportive technology. The energy beambased patterning process (electron-beam lithography) has some limitations due to poor control of 3D structures, low material removal rate, and low aspect ratio. Moreover, these processes require special facilities, and the maximum achievable thickness is relatively small. Some of these limitations can be overcome by a tool-based approach using ultra-precision machine tools and solid tools as cutting elements to produce the micro-features with well-controlled shape and tolerances. These micro/nano machiningbased patterning techniques have been achieved through a paradigm shift in the ideas and processes of conventional machining. In this paper, an attempt has been made to present the recent innovations in tool-based micro/nano patterning processes.