Numerical computation of deposited power of a planar glow discharge into the cathode

In this paper, we evaluate the kinetic energy of positive ions in the vicinity of surrounding wall. In this model, we assume that the electrons are distributed according to the Boltzman distribution. In addition, we take a constant and finite temperature for ions. The positive ions are treated by means of the fluid equations. Furthermore, the ions experience the collisions with the immobile neutral background. The profiles of discharge parameters such as density and ion flow velocity as well as electric potential through the sheath are obtained. Finally, the kinetic energy of the ions which deposited into the cathode in collisionless and collisional cases is evaluated.