A Comparative Study of PZT-Based TiNi- Shape Memory Alloy Based MEMS Microactuators

In this paper, we are interested in drawing a comparison between PZT TiNi shape memory alloy (SMA) thin films using microelectromechanical systems (MEMS). Also, we present a new hybrid heterogeneous structure. Different characteristics are investigated in this comparative study. Based on the comparison made, it was shown that TiNi-SMA based microactuators can serve higher flow rates in fluid systems and at low operating voltages in comparison with that provided by PZT-Based microactuators. Another concluded result indicates that the fast response and the high operating frequencies are provided by PZT-based microactuators, but displacement is relatively small, whereas TiNi-SMA has a slow response frequency and a large force-displacement. By combining TiNi and PZT films, we proposed in our paper a new hybrid heterogeneous structure that can utilize the unique properties of the individual bulk materials and present large displacement and multiple responses.