Application of FIB-SEM Techniques for the Advanced Characterization of Earth and Planetary Materials

Advanced microanalytical techniques such as high-resolution transmission electron microscopy (HRTEM), atom probetomography (APT), and synchrotron-based scanning transmission X-ray microscopy (STXM) enable one to characterize thestructure and chemical and isotopic compositions of natural materials down towards the atomic scale. Dual focused ionbeam-scanning electron microscopy (FIB-SEM) is a powerful tool for site-specific sample preparation and subsequentanalysis by TEM, APT, and STXM to the highest energy and spatial resolutions. FIB-SEM also works as a stand-alonetechnique for three-dimensional (3D) tomography. In this review, we will outline the principles and challenges when usingFIB-SEM for the advanced characterization of natural materials in the Earth and Planetary Sciences. More specifically, weaim to highlight the state-of-the-art applications of FIB-SEM using examples including (a) traditional FIB ultrathin samplepreparation of small particles in the study of space weatheringof lunar soil grains, (b) migration of Pb isotopes in zircons byFIB-based APT, (c) coordinated synchrotron-based STXM characterization of extraterrestrial organic material incarbonaceous chondrite, andfinally (d) FIB-based 3D tomography of oil shale pores by slice and view methods. Dual beamFIB-SEM is a powerful analytical platform, the scope of which, for technological development and adaptation, is vast andexciting in thefield of Earth and Planetary Sciences. For example, dual beam FIB-SEM will be a vital technique for thecharacterization offine-grained asteroid and lunar samples returned to the Earth in the near future.