Author/Authors :
Xie, Hui State Key Laboratory of Robotics and Systems - Harbin Institute of Technology - Harbin , China , Wen, Yongbing State Key Laboratory of Robotics and Systems - Harbin Institute of Technology - Harbin , China , Song, Jianmin State Key Laboratory of Robotics and Systems - Harbin Institute of Technology - Harbin , China , Fan, Xinjian State Key Laboratory of Robotics and Systems - Harbin Institute of Technology - Harbin , China , Hussain, Danish State Key Laboratory of Robotics and Systems - Harbin Institute of Technology - Harbin , China , Zhang, Hao State Key Laboratory of Robotics and Systems - Harbin Institute of Technology - Harbin , China
Abstract :
An efficient and adaptive boundary tracking method is developed to confine area of interest for high-efficiency local scanning.By using a boundary point determination criterion, the scanning tip is steered with a sinusoidal waveform while estimatingazimuth angle and radius ratio of each boundary point to accurately track the boundary of targets. A local scan region and pathare subsequently planned based on the prior knowledge of boundary tracking to reduce the scan time. Boundary tracking andlocal scanning methods have great potential not only for fast dimension measurement but also for sample surface topography andphysical characterization, with only scanning region of interest. The performance of the proposed methods was verified by usingthe alternate current mode scanning ion-conductance microscopy, tapping, and PeakForce modulation atomic force microscopy.Experimental results of single/multitarget boundary tracking and local scanning of target structures with complex boundariesdemonstrate the flexibility and validity of the proposed method.
Keywords :
Fast Specimen Boundary Tracking , Local Imaging , Scanning Probe Microscopy , AFM , Scanning probe microscopes (SPMs)
