Damage profile and mode observation in LiTaO3 by low-energy H+ ions

LiTaO3 samples were implanted with 50, 80, 120, and 150 keV H + ions. The damage profiles in LiTaO3 induced by H+ ions were investigated using the Rutherford backscattering/channeling technique. We used TRIM (transport of ions in matter) to simulate it. It was found that the shape of the experimental damage profile was similar to one predicted by TRIMʹ98, but the experimental damage ratio (NDN) was higher than the calculated damage ratio based on TRIMʹ98. The modes in LiTaO3 were measured by a prism-coupling method for all samples. The modes were observed only for LiTaO3 implanted with 80, 120, and 150 keV H+ ions. The present result shows that optical wave guides in LiTaO3 can be formed by lower energy H+ ions.