Investigation of the Structural and Electrical Properties of Star Shape Manganese Thin Films with 3-fold and 4-fold Symmetries

Manganese star shape sculptured thin films with 3-fold and 4-fold symmetries were formed on glass substrates using glancing angle deposition method. The cross section of the structures was observed by field emission scanning electron microscopy. Atomic force microscopy and X-ray diffraction patterns were used to investigate the surface morphology and crystalline degree of the samples. The grain size and surface roughness of the samples were obtained using Nova software. The results showed that the porosity percentage of the star shape thin films depended on the grain size andshape of the structures. The electrical resistance of the star shape sculptured thin films was obtained using a four-point probe technique. Finally, electrical resistance dependence on the porosity percentage was investigated.