Author/Authors :
Uetsuka، Hiroshi نويسنده , , Sakama، Hiroshi نويسنده , , Saeki، Shinji نويسنده , , Ono، Atsushi نويسنده , , Ichikawa، Noriya نويسنده , , Tanokura، Atsushi نويسنده , , Onishi، Hiroshi نويسنده ,
Abstract :
The detection sensitivities of La-loaded SnO2 films prepared using reactive RF magnetron sputtering to CO2 were measured at various temperatures. The maximum sensitivity was attained at 200 °C for a film loaded with 5 atom % La. Pure SnO2 films revealed good crystallinity of the rutile phase. The crystallization of SnO2 films was suppressed by La loading.
Keywords :
Application-production research , prediction , Genetic-fuzzy system , grinding , Surface finish , Power requirement
