• Title of article

    Combined use of computational intelligence ، materials data for on-line monitoring ، control of MBE experiments

  • Author/Authors

    Zhuo Meng، نويسنده , , Qian Yang، نويسنده , , P. C. Yip، نويسنده , , K. G. Eyink، نويسنده , , W. T. Taferner، نويسنده , , B. Igelnik، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1998
  • Pages
    9
  • From page
    587
  • To page
    595
  • Keywords
    optimization , Molecular beam epitaxy (MBE) , Process monitoring and control , Ellipsometry , Guided evolutionary simulated annealing (GESA) , Stochastic Search
  • Journal title
    Engineering Applications of Artificial Intelligence
  • Serial Year
    1998
  • Journal title
    Engineering Applications of Artificial Intelligence
  • Record number

    301518

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=301518