مرکز منطقه ای اطلاع رساني علوم و فناوري - Design of a dedicated parallel processor for the simulation of the photolithography process using a genetic algorithm

Title of article :

Design of a dedicated parallel processor for the simulation of the photolithography process using a genetic algorithm

Author/Authors :

Ioannis Karafyllidis Preview PDF (439 K) ، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 1999

Pages :

From page :

411

To page :

427

Keywords :

Photolithography , Dedicated processors , cellular automata , Genetic algorithms

Journal title :

Engineering Applications of Artificial Intelligence

Serial Year :

1999

Journal title :

Engineering Applications of Artificial Intelligence

Record number :

301565

Link To Document :