Title of article
Dissolution of copper thin films in hydroxylamine-based solutions
Author/Authors
Wayne Huang، نويسنده , , Subramanian Tamilmani، نويسنده , , Srini Raghavan، نويسنده , , Robert Small، نويسنده ,
Pages
8
From page
365
To page
372
Keywords
Hydroxylamine , copper CMP , Corrosion inhibitors
Journal title
Astroparticle Physics
Record number
315773
Link To Document