Title of article
Determination of the hydrogen concentration of silicon nitride layers by Fourier transform infrared spectroscopy
Author/Authors
I. Jonak-Auer، نويسنده , , R. Meisels، نويسنده , , F. Kuchar، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1997
Pages
4
From page
223
To page
226
Keywords
Chalcogenide films , Fiber optics , Optical constants
Journal title
Infrared Physics & Technology
Serial Year
1997
Journal title
Infrared Physics & Technology
Record number
327519
Link To Document