مرکز منطقه ای اطلاع رساني علوم و فناوري - Semiconductor IR laser spectroscopy in application to oxygen concentration distribution determination in silicon wafers

Title of article :

Semiconductor IR laser spectroscopy in application to oxygen concentration distribution determination in silicon wafers

Author/Authors :

S. D. Darchuk، نويسنده , , F. F. Sizov، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 1998

Pages :

From page :

To page :

Journal title :

Infrared Physics & Technology

Serial Year :

1998

Journal title :

Infrared Physics & Technology

Record number :

327554

Link To Document :