Title of article :
Groove depth dependence of IR transmission spectra through silicon gratings: experiment versus theory
Author/Authors :
Shlomo Hava، نويسنده , , Mark Auslender، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2000
Keywords :
Gratings modeling , IR transmission , FTIR spectrometry , Silicon micromachining , Di?raction gratings
Journal title :
Infrared Physics & Technology
Journal title :
Infrared Physics & Technology
