Title of article
Different modes of capacitively coupled radio-frequency discharge in methane
Author/Authors
I. V. Schweigert، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
8
From page
719
To page
726
Journal title
Journal of Experimental and Theoretical Physics
Serial Year
2004
Journal title
Journal of Experimental and Theoretical Physics
Record number
330939
Link To Document