• Title of article

    Different modes of capacitively coupled radio-frequency discharge in methane

  • Author/Authors

    I. V. Schweigert، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2004
  • Pages
    8
  • From page
    719
  • To page
    726
  • Journal title
    Journal of Experimental and Theoretical Physics
  • Serial Year
    2004
  • Journal title
    Journal of Experimental and Theoretical Physics
  • Record number

    330939