مرکز منطقه ای اطلاع رساني علوم و فناوري - Different modes of capacitively coupled radio-frequency discharge in methane

Title of article :

Different modes of capacitively coupled radio-frequency discharge in methane

Author/Authors :

I. V. Schweigert، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2004

Pages :

From page :

719

To page :

726

Journal title :

Journal of Experimental and Theoretical Physics

Serial Year :

2004

Journal title :

Journal of Experimental and Theoretical Physics

Record number :

330939

Link To Document :