مرکز منطقه ای اطلاع رساني علوم و فناوري - Fabrication of high-frequency electron beam moiré grating using multi-deposited layer techniques

Title of article :

Fabrication of high-frequency electron beam moiré grating using multi-deposited layer techniques

Author/Authors :

Huimin Xie، نويسنده , , Satoshi Kishimoto and Norio Shinya، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2000

Pages :

From page :

361

To page :

367

Keywords :

Model grating , electron beam lithography , Multi-deposited layer method , Electron beam moir e

Journal title :

OPTICS & LASER TECHNOLOGY

Serial Year :

2000

Journal title :

OPTICS & LASER TECHNOLOGY

Record number :

334753

Link To Document :