Title of article
ArF-excimer-laser annealing of 3C–SiC films—diode characteristics and numerical simulation
Author/Authors
T. Mizunami and N. Toyama، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
6
From page
451
To page
456
Keywords
silicon carbide , Laser annealing , excimer laser
Journal title
OPTICS & LASER TECHNOLOGY
Serial Year
2003
Journal title
OPTICS & LASER TECHNOLOGY
Record number
334963
Link To Document