Sub-nanometric precision displacement sensing using low mass and rough surfaces as movable targets

Manohar Virdee، نويسنده ,

روزنامه با شماره پیاپی سال 2004

9

107

115

Displacement sensing , Sub-nanometric resolutions , Low mass targets and suitable in hostile environments , Non-contacting , Phase quadrature , Nanometricprecision , Rough and retro-re4ecting surfaces

OPTICS & LASER TECHNOLOGY

2004

OPTICS & LASER TECHNOLOGY

335019