مرکز منطقه ای اطلاع رساني علوم و فناوري - Projection ablation of glass-based single and arrayed microstructures using excimer laser

Title of article :

Projection ablation of glass-based single and arrayed microstructures using excimer laser

Author/Authors :

Ying-Tung Chen، نويسنده , , Kung-Jeng Ma، نويسنده , , Ampere A. Tseng and P. H. Chen، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2005

Pages :

From page :

271

To page :

280

Keywords :

excimer laser , GLASS , Micromachining , Polyimide , Microneedle , Silicon , Ablation , Debris , Ablation rate , Arrayed microstructure , morphology

Journal title :

OPTICS & LASER TECHNOLOGY

Serial Year :

2005

Journal title :

OPTICS & LASER TECHNOLOGY

Record number :

335157

Link To Document :