مرکز منطقه ای اطلاع رساني علوم و فناوري - Investigation of pupil-fill factors as process window indicators for dry optical lithography

Title of article :

Investigation of pupil-fill factors as process window indicators for dry optical lithography

Author/Authors :

Jeun Kee Chua، نويسنده , , Vadakke Matham Murukeshan، نويسنده , , Sia Kim Tan and Qun Ying Lin، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2008

Pages :

From page :

142

To page :

155

Keywords :

Dry optical lithography , Process window , Intensity attenuated phase shifting

Journal title :

OPTICS & LASER TECHNOLOGY

Serial Year :

2008

Journal title :

OPTICS & LASER TECHNOLOGY

Record number :

335591

Link To Document :