Title of article
The role of materials science in microelectronics: past, present and future
Author/Authors
S. Mahajan، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
23
From page
487
To page
509
Journal title
Progress in Energy and Combustion Science
Serial Year
2004
Journal title
Progress in Energy and Combustion Science
Record number
342137
Link To Document