Title of article :
Silicon surface nano-oxidation using scanning probe microscopy
Author/Authors :
Didier Stiévenard، نويسنده , , Bernard Legrand، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2006
Keywords :
NANOTECHNOLOGY , Scanning tunneling microscope (STM) , Silicon surface , Atomic force microscope (AFM) , Nanooxidation , Nanostructures
Journal title :
Progress in Surface Science
Journal title :
Progress in Surface Science