Title of article
Progress in Microelectromechanical Systems
Author/Authors
Progress in Microelectromechanical Systems، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
13
From page
13
To page
25
Keywords
MEMS systems , nanometer accuracy , specific applications , test/characterisati , NDT , adverse conditions , ACES methodology , EDUCATION , high operational speeds , low power , full field-of-view , Materials , computational analysis/simulation , packaging
Journal title
Strain
Serial Year
2007
Journal title
Strain
Record number
343056
Link To Document