Title of article :
Computation of 3D MEMS electrostatics using a nearly exact BEM solver
Author/Authors :
S. Muhkopadhyay and N. Majumdar، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Keywords :
Electrostatics , MEMS , Thin plates , boundary element method , Green function
Journal title :
Engineering Analysis with Boundary Elements
Journal title :
Engineering Analysis with Boundary Elements