Title of article :
Determination of maximum allowable strain for polysilicon micro-devices
Author/Authors :
S. C. Bromley، نويسنده , , L. L. Howell and B. D. Jensen، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1999
Pages :
15
From page :
27
To page :
41
Keywords :
strain analysis , Micro-mechanical systems , brittle fracture , electronic-device failures
Journal title :
Engineering Failure Analysis
Serial Year :
1999
Journal title :
Engineering Failure Analysis
Record number :
349109
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=349109
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