مرکز منطقه ای اطلاع رساني علوم و فناوري - A methodology for determining mechanical properties of freestanding thin films and MEMS materials

Title of article :

A methodology for determining mechanical properties of freestanding thin films and MEMS materials

Author/Authors :

H. D. Espinosa، نويسنده , , B. C. Prorok ، نويسنده , , M. Fischer، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2003

Pages :

From page :

To page :

Keywords :

MEMS materials , Thin (lms , mechanical properties , Micro-tensile test

Journal title :

Journal of the Mechanics and Physics of Solids

Serial Year :

2003

Journal title :

Journal of the Mechanics and Physics of Solids

Record number :

354581

Link To Document :