Title of article :
A model for chemical–mechanical polishing of a material surface based on contact mechanics
Author/Authors :
J. J. Vlassak، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2004
Keywords :
A: Wear and ablation , B: Chemical mechanical polishing , Contact mechanics
Journal title :
Journal of the Mechanics and Physics of Solids
Journal title :
Journal of the Mechanics and Physics of Solids
