Title of article :
Three-way silicon microvalve for pneumatic applications with electrostatic actuation principle
Author/Authors :
S. Messner، نويسنده , , J. Schaible، نويسنده , , H. Sandmaier and R. Zengerle ، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2006
Pages :
8
From page :
89
To page :
96
Keywords :
Microvalve Electrostatic actuation Silicon micromachining Pneumatics
Journal title :
Microfluidics and Nanofluidics
Serial Year :
2006
Journal title :
Microfluidics and Nanofluidics
Record number :
356448
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=356448
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