Title of article :
Topography and lattice strain development on patterned Si surfaces
Author/Authors :
J. M. Blakely ، نويسنده , , C. C. Umbach، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1999
Pages :
10
From page :
3
To page :
12
Keywords :
Si surfaces , Tunneling microscopy , Optical and electron diffraction , evaporation , Atomic steps , diffusion , Step-free surfaces , Lattice strain , Stepdynamics , Atomic force microscopy
Journal title :
Micron
Serial Year :
1999
Journal title :
Micron
Record number :
356759
Link To Document :
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