• Title of article

    Topography and lattice strain development on patterned Si surfaces

  • Author/Authors

    J. M. Blakely ، نويسنده , , C. C. Umbach، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1999
  • Pages
    10
  • From page
    3
  • To page
    12
  • Keywords
    Si surfaces , Tunneling microscopy , Optical and electron diffraction , evaporation , Atomic steps , diffusion , Step-free surfaces , Lattice strain , Stepdynamics , Atomic force microscopy
  • Journal title
    Micron
  • Serial Year
    1999
  • Journal title
    Micron
  • Record number

    356759

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=356759