Title of article :
Analyses of composition and chemical shift of silicon oxynitride film using energy-filtering transmission electron microscope based spatially resolved electron energy loss spectroscopy
Author/Authors :
K. Kimoto، نويسنده , , K. Kobayashi، نويسنده , , T. Aoyama ، نويسنده , , Y. Mitsui، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1999
Keywords :
Electron energy loss spectroscopy (EELS) , Energy-filtering transmission electron microscope , Spatially resolved EELS , Chemical shift , Siliconoxynitride
